Method for forming CVD-SiC layer and CVD-SiC layer formed by the method
发布时间：2018-04-03 18:08:00
发明人：Song Zhang, Rong Tu, Takashi Goto, Mingxu Han；Method for forming CVD-SiC layer and CVD-SiC layer formed by the method, Oct. 29, 2015, PCT/CN2015/093160
